Two compliant bistable micro-mechanisms have been developed which can be switched in either direction using on-chip thermal actuation. The energy storage and bistable behavior of the mechanisms are achieved through the elastic deflection of compliant segments. The pseudo-rigid-body model was used for the compliant mechanism design, and for analysis of the large-deflection flexible segments. To achieve on-chip actuation, the mechanism designs were optimized to reduce their required rotation, allow them to be switched using linear-motion thermal actuators. The modeling theory and analysis are presented for several design iterations. Each iteration was successfully fabricated and tested using either the MUMPs or SUMMiT surface micromachining technology.
| Identifer | oai:union.ndltd.org:BGMYU2/oai:scholarsarchive.byu.edu:etd-1051 |
| Date | 11 March 2003 |
| Creators | Baker, Michael S. |
| Publisher | BYU ScholarsArchive |
| Source Sets | Brigham Young University |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | Theses and Dissertations |
| Rights | http://lib.byu.edu/about/copyright/ |
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