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Analýza komory diferenciálního čerpání EREM pomocí systému Cosmos FloWorks / Using Cosmos FloWorks for analysis of the ESEM differential chamber

The paper outlines fundamental issues of electron microscopy and models three selected shapes of the differential chamber using the SolidWorks system. The models are then analysed using Cosmos FloWorks with regard to vacuum pumping. The aim is to find a model with minimum pressure in the electron beam trajectory and hence the least dissipation.

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:217855
Date January 2009
CreatorsJašek, Michal
ContributorsŠpinka, Jiří, Maxa, Jiří
PublisherVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Source SetsCzech ETDs
LanguageCzech
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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