The development of micro and nanoelectronics and nanophotonics needs novel characterization techniques to ensure higher quality of designed devices. The thesis describes a use of Scanning Near-field Optical Microscopy (SNOM) in dimensional control and in local investigation of diverse physical parameters. As example of its potential, the correlation between object topography and reflection measurement of capacitors is shown.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:218237 |
| Date | January 2010 |
| Creators | Müller, Pavel |
| Contributors | Škarvada, Pavel, Tománek, Pavel |
| Publisher | Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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