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Electrical characterisation of SIMOX SiO←2 for silicon-on-insulator technology

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Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:263706
Date January 1996
CreatorsNgwa, Chrisantus Soh
PublisherUniversity of Liverpool
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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