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Exploration of Novel Silicon Devices Toward the Realization of a MEMS-Based Microsystem for Utilities (Water, Gas, Electrical) Monitoring

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Identiferoai:union.ndltd.org:OhioLink/oai:etd.ohiolink.edu:ucin985901586
Date11 October 2001
CreatorsKankanam, Gamage Sisira
PublisherUniversity of Cincinnati / OhioLINK
Source SetsOhiolink ETDs
LanguageEnglish
Detected LanguageEnglish
Typetext
Sourcehttp://rave.ohiolink.edu/etdc/view?acc_num=ucin985901586
Rightsunrestricted, This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws.

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