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CVD and ALD of group IV- and V-Oxides for dielectric application /

Diss. (sammanfattning) Uppsala : Univ., 2001. / Härtill 8 uppsatser.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/186077831
Date January 1900
CreatorsForsgren, Katarina,
PublisherUppsala : Acta Universitatis Upsaliensis : Univ.-bibl. [distributör],
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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