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Hot-Wire-Gasphasenabscheidung von nanokristallinem Silicium und Silicium-Germanium

Stuttgart, Univ., Diss., 2002.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/314310757
Date January 2003
CreatorsBrühne, Kai.
Publisher[S.l. : s.n.],
Source SetsOCLC
LanguageGerman
Detected LanguageGerman
TypeOnline-Publikation.

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