Hot-Wire-Gasphasenabscheidung von nanokristallinem Silicium und Silicium-Germanium

Description

Stuttgart, Univ., Diss., 2002.

Links & Downloads

1. urn:nbn:de:bsz:93-opus-13646
2. http://www.bsz-bw.de/cgi-bin/xvms.cgi?SWB10447205

Tags

Cat-CVD-Verfahren. Photolumineszenz.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/314310757
Date	January 2003
Creators	Brühne, Kai.
Publisher	[S.l. : s.n.],
Source Sets	OCLC
Language	German
Detected Language	German
Type	Online-Publikation.