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Characterization of perfluorocompound emission and abatement kinetics in plasma processes

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1996. / Includes bibliographical references (leaves 136-142). / by Vivek Mohindra. / Ph.D.

Identiferoai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/11264
Date January 1996
CreatorsMohindra, Vivek
ContributorsHerbert H. Swain., Massachusetts Institute of Technology. Dept. of Chemical Engineering
PublisherMassachusetts Institute of Technology
Source SetsM.I.T. Theses and Dissertation
LanguageEnglish
Detected LanguageEnglish
TypeThesis
Format188 leaves, 12324346 bytes, 12324104 bytes, application/pdf, application/pdf, application/pdf
RightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission., http://dspace.mit.edu/handle/1721.1/7582

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