Return to search

Rapid thermal CVD of epitaxial silicon from dichlorosilane source

No description available.

1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.333849

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:333849
Date	January 1993
Creators	Ye, Liang
Publisher	Queen's University Belfast
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation