The application and limitations of PECVD for silicon-based photonics /

Description

Thesis (Ph.D.)--Australian National University, 2005.

Links & Downloads

1. http://thesis.anu.edu.au/public/adt-ANU20070315.043442/index.html

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/271868522
Date	January 2005
Creators	Spooner, Marc.
Source Sets	OCLC
Language	English
Detected Language	English
Source	View thesis entry in Australian Digital Program