Cost analysis on the use of chamber cleaning agents nitrogen trifluoride and chlorine trifluoride in the semiconductor industry

Description

Thesis, PlanB (M.S.)--University of Wisconsin--Stout, 1999. / Includes bibliographical references.

Links & Downloads

1. http://www.uwstout.edu/lib/thesis/1999/1999emmerichj.pdf

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/42287664
Date	January 1999
Creators	Emmerich, Jodi.
Source Sets	OCLC
Language	English
Detected Language	English
Source	Online version