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Design and synthesis of volatile compounds for chemical vapor deposition of electronic materials

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1. 493783
2. http://hdl.handle.net/1853/30487

Identifer	oai:union.ndltd.org:GATECH/oai:smartech.gatech.edu:1853/30487
Date	05 1900
Creators	Matthews, Jason Shastri
Publisher	Georgia Institute of Technology
Source Sets	Georgia Tech Electronic Thesis and Dissertation Archive
Detected Language	English
Type	Dissertation