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Development of a novel optical contact probing system for nano-CMM /

This thesis describes the development and the verification of a novel micro probe system for high accurancy downscaled Coordinate Measuring Machines (CMMs). / Thesis (PhD)--University of South Australia, 2008.

Identiferoai:union.ndltd.org:ADTP/267014
Date January 2008
CreatorsJi, Hong.
Source SetsAustraliasian Digital Theses Program
LanguageEnglish
Detected LanguageEnglish
Rightscopyright under review

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