This report presents the redesign of the Ultra-Low Energy Implanter (LEION) at the Tandem Laboratory. The primary objectives were to evaluate the current configuration of LEION, identify potential improvements through simulations, and enhance the control software, SIMBA. The studyinvolved detailed simulations of ion trajectories within the LEION system using the SIMION software, focusing on the steering plates and the sample holder. Key findings highlighted limitationsin the current setup, including the steering plates configuration. Which were addressed througha proposed new design that would solve many of LEION’s current shortcomings by incorporating an additional electromagnetic lens into the system. Upgrades to the SIMBA interface aimed tointegrate additional functionalities, streamline beam alignment, and consolidate control systemsto improve user accessibility. The redesigned system demonstrated improved performance insimulations, providing a more even ion distribution and enhanced usability. This project offerssignificant insights into optimising low-energy ion implantation systems and presents a frameworkfor future developments in this field.
| Identifer | oai:union.ndltd.org:UPSALLA1/oai:DiVA.org:uu-532954 |
| Date | January 2024 |
| Creators | Berggren, Isak, Halldin, Max, Wikingson, Viktor |
| Publisher | Uppsala universitet, Tandemlaboratoriet |
| Source Sets | DiVA Archive at Upsalla University |
| Language | English |
| Detected Language | English |
| Type | Student thesis, info:eu-repo/semantics/bachelorThesis, text |
| Format | application/pdf |
| Rights | info:eu-repo/semantics/openAccess |
| Relation | MATVET-F ; MAT-VET-F-24032 |
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