This thesis presents the design of a scratch drive actuator (SDA) for Micro Motor Application. In accordance with the force needed to drive the mechanism, the relationship among SDA output force, geometries, and applied voltage is first constructed by employing the principle of virtual work. Having selected the topology of the device, the equations governing the motions and the forces of the micro motor and the actuator can be derived. The SDA and the associated micro motor mechanism are designed by considering the characteristics of Multi-User MEMS Processes, or MUMPs fabrication process. There are several types of SDA used for step motor application being designed and fabricated as illustrative samples. The chip well defined in MUMPs is released by immersing the chip in a bath of HF. It is followed by cleaning in DI water and IPA on a hot plate at 150¢J to reduce stiction.¡@The samples are inspected by OM and SEM, respectively.¡@The experimental and analytical results indicate the practicability of the proposed design concept.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0728106-170816 |
| Date | 28 July 2006 |
| Creators | Chen, Kuan-ming |
| Contributors | Shiang-Hwua Yu, Jin-Chern Chiou, Lieh-hsi Lo, Ruey-Shing Huang, I-Yu Huang |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0728106-170816 |
| Rights | not_available, Copyright information available at source archive |
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