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Návrh a sestavení laboratorního vzoru laserového deflektometru pro měření mechanického napětí v tenkých vrstvách / Design and set up of a laboratory sample of a laser deflectometer for measurement of mechanical stress within thin films

This diploma thesis describes the design of a device for measuring stress in thin films – laser deflectometer, realization of its design and its experimental testing. The thesis is divided into five chapters. The first chapter deals with the stress in thin films and its influence on substrate – thin film system. The second chapter provides an overview of devices widely used for measuring stress in thin films and describes some their advantages and disadvantages. In the third chapter some design possibilities of the device are presented. The final solution of device called deflectometr is introduced in the fourth chapter. The last chapter includes the functional testing the device.

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:254340
Date January 2016
CreatorsŠustek, Štěpán
ContributorsKlapetek,, Petr, Ohlídal, Miloslav
PublisherVysoké učení technické v Brně. Fakulta strojního inženýrství
Source SetsCzech ETDs
LanguageCzech
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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