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CMOS On-Chip 3D Inductor Design & Application in RF Bio-Sensing

abstract: Three-dimensional (3D) inductors with square, hexagonal and octagonal geometries have been designed and simulated in ANSYS HFSS. The inductors have been designed on Silicon substrate with through-hole via with different width, spacing and thickness. Spice modeling has been done in Agilent ADS and comparison has been made with results of custom excel based calculator and HFSS simulation results. Single ended quality factor was measured as 12.97 and differential ended quality factor was measured as 15.96 at a maximum operational frequency of 3.65GHz. The single ended and differential inductance was measured as 2.98nH and 2.88nH respectively at this frequency. Based on results a symmetric octagonal inductor design has been recommended to be used for application in RF biosensing. A system design has been proposed based on use of this inductor and principle of inductive sensing using magnetic labeling. / Dissertation/Thesis / M.S. Electrical Engineering 2012

Identiferoai:union.ndltd.org:asu.edu/item:14568
Date January 2012
ContributorsAbbey, Hemanshu (Author), Bakkaloglu, Bertan (Advisor), Kiaei, Sayfe (Committee member), Goryll, Michael (Committee member), Arizona State University (Publisher)
Source SetsArizona State University
LanguageEnglish
Detected LanguageEnglish
TypeMasters Thesis
Format66 pages
Rightshttp://rightsstatements.org/vocab/InC/1.0/, All Rights Reserved

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