Design and testing of a lateral field excited rate monitor for use in thin film deposition systems /

Description

Thesis (M.S.) in Electrical Engineering--University of Maine, 2009. / Includes vita. Includes bibliographical references (leaves 110-113).

Links & Downloads

1. http://www.library.umaine.edu/theses/theses.asp?highlight=1&Cmd=abstract&ID=ECE2009-003

Tags

Detectors Thin film devices.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/503461062
Date	January 2009
Creators	Sgambato, Kristopher,
Source Sets	OCLC
Language	English
Detected Language	English