Thermal stability study of lanthanum in hafnium-based metal gate stacks /

Description

Thesis (M.S.)--University of Texas at Dallas, 2008. / Includes vita. Includes bibliographical references (leaves 118-121)

Links & Downloads

1. http://proquest.umi.com/pqdweb?did=1654494071&sid=2&Fmt=2&clientId=10361&RQT=309&VName=PQD

Tags

Dielectrics. Materials science.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/312182266
Date	January 2008
Creators	Selvidge, Miles Vernon,
Source Sets	OCLC
Language	English
Detected Language	English