CMOS-Prozessintegration von epitaktischen Selten-Erden-Oxiden als High-K-Dielektrika auf SOI-Substraten /

Description

Zugl.: Aachen, Techn. Hochsch., Diss., 2007.

Links & Downloads

1. http://d-nb.info/988057999/04
2. http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&doc_number=017068878&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/316148105
Date	January 2008
Creators	Gottlob, Heinrich Dieter Bernd,
Publisher	Aachen : Shaker,
Source Sets	OCLC
Language	German
Detected Language	German