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Active control of a diffraction grating interferometer for microscale devices

Thesis (M. S.)--Mechanical Engineering, Georgia Institute of Technology, 2004. / Dr. William P. King, Committee Member ; Dr. F. Levent Degertekin, Committee Member ; Dr. Thomas R. Kurfess, Committee Chair.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/61809273
Date January 2004
CreatorsSchmittdiel, Michael C.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology, 2005.

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