The purpose of this research was to deposit the protective diamond-like carbon (DLC) films on polycarbonate substrates for optical applications. In this study, by using the PECVD method is the better way to deposit DLC film on polycarbonate substrates since the whole process were performed at low temperature to avoiding any degradation of the adhesion of DLC film on polycarbonate substrates occurred at high temperature.
In order to further increase the adhesion between the polycarbonate substrates and the DLC film, we deposited the SiO2 layer as an interlayer, and select HMDSO as precursor because it contain Si and O atoms. It is because that SiOx films that can be deposited from HMDSO/oxyzen feeds are relatively hard and against mechanical damages due to forming the glass-link structure. In addition, SiOx films are fully transparent in the UV range and decrease the difference of TCE ( thermal expansion coefficient) of PC and coating films. In experiments, it is preceded being focus on the analysis of Raman spectrum for the films grown at various CH4 gas fluxes, substrates bias voltages, Si-doping concentrations and the distance of electrode separation. The dependence of the intensity ratio of D-band and G-band ( ID/IG ) on the surface roughness, hardness and mechanical properties were investigated, and the adhesion of coating layer depends on the thickness of intermediate layer were studied under various substrate bias voltage.
At least, the properties of diamond-like carbon (DLC) film coatings on phase-change recording media were characterized by Raman spectroscopy, atomic force microscope (AFM), UV-visible spectrometer and disc testers. The dependence of mechanical, optical and structural properties of DLC films included the characteristics of surface roughness, hardness, transmittance and electrical signals of discs on serveral DLC film thicknesses were investigated. Our experimental results indicate that DLC films provide a suitable coating to protect PC substrate and make it no difference for data stored on phase-change optical discs.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0706104-173511 |
| Date | 06 July 2004 |
| Creators | Li, Jian-zheng |
| Contributors | Wan-quan Guo, Heng-yi Weng, Ai-na Hong, Qiu-bing Chen, Zhi-xiong Liao |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0706104-173511 |
| Rights | not_available, Copyright information available at source archive |
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