ECR-Plasmadiagnostik im System Ar-H 2 -N 2 -TMS und Charakterisierung der entstehenden SiC x N y :H-Schichten

Description

Chemnitz, Techn. Univ., Diss., 2002.

Links & Downloads

1. http://www.bsz-bw.de/cgi-bin/xvms.cgi?SWB10424168

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/314240438
Date	January 2001
Creators	Dani, Ines,
Publisher	[S.l. : s.n.],
Source Sets	OCLC
Language	German
Detected Language	German
Type	Online-Publikation.