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Design and synthesis of methacrylate based polymers for use as electron beam resists

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1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.481092

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:481092
Date	January 1991
Creators	Davies, Richard D. P.
Publisher	University of Kent
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation