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Víceelektrodový systém ionizačního detektoru pro environmentální rastrovací elektronový mikroskop / Multi-electrode system of ionization detector for environmental scanning electrone microscope

Thesis deals with environmental scanning electron microscopy and with detection of signal electrons by using ionization detector. First part talks about the principle of environmental scanning electron microscope. Second part describes signals generated by interaction of primary electron beam with sample. Third section explains the principle of impact ionization and ionization detector. Experimental part deals with usage of segmental ionization detector and with measuring of signal amplification from copper and platinum. Thesis also examines arrangement of electrodes of ionisation detector on material contrast and examines also on influence of voltage contrast on base - emitter junction of an NPN bipolar transistor. All experiments were carried out in dependency on saturated water vapour pressure in sample chamber.

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:220278
CreatorsUhlář, Vít
ContributorsŠpinka, Jiří, Jirák, Josef
PublisherVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Source SetsCzech ETDs
LanguageCzech
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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