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Thermal Transient Study of Silica Aerogel Insulated Micro-hotplates

<p> We studied the temperature transient behavior of an airpit-insulated micro hotplate (&micro;HP) and aerogel-insulated &micro;HP with different airpit heights and aerogel thicknesses. The &micro;HP insulated by 1.3&micro;m-thick aerogel consumes 26.7mW of power at 82&deg;C with a time constant of 114.5 &micro;sec, while the &micro;HP insulated by 4?&micro;m-thick aerogel consumes 35.6mW of power to provide 220&deg;C with a time constant of 211.6 &micro;sec. At the same time, a 100 &micro;m-deep airpit-insulated ?HP consumes 18mW of power to reach approximately 400&deg;C. The time constant of aerogel does not depend just on material properties but also on the structural design of the micro-heater. The temperature transient response time of &micro;HPs is continued to improve from using air-pited, recessed silica aerogel, to thick-film silica aerogel.</p>

Identiferoai:union.ndltd.org:PROQUEST/oai:pqdtoai.proquest.com:10002455
Date28 January 2016
CreatorsEdpuganti, Koutilya
PublisherUniversity of Louisiana at Lafayette
Source SetsProQuest.com
LanguageEnglish
Detected LanguageEnglish
Typethesis

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