This thesis is focused on the environmental scanning electron microscopes including a description of the basic physical mechanisms. It describes the design and realization of the electrode ionization detector system suitable for the detection of signal electrons with a greater proportion of secondary electrons. It also deals with simulations of trajectories of electrons in the electrostatic field of the detector, and with verification of the functionality of the detector in the environment of water vapors in the specimen chamber of the electron microscope.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:220106 |
| Date | January 2013 |
| Creators | Pokluda, Tomáš |
| Contributors | Špinka, Jiří, Jirák, Josef |
| Publisher | Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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