Multiple thin films which are conducting, insulating and semiconducting are important components of integrated circuit technology. Circuits are fabricated from these layers by patterning the films to form isolated circuit elements which are themselves interconnected by patterned films (1).
| Identifer | oai:union.ndltd.org:UMASS/oai:scholarworks.umass.edu:theses-2962 |
| Date | 01 January 1982 |
| Creators | Narula, Ameeta |
| Publisher | ScholarWorks@UMass Amherst |
| Source Sets | University of Massachusetts, Amherst |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | Masters Theses 1911 - February 2014 |
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