This thesis describes the optimization and characterisation of an integrated fluxgate sensor. It is fabricated with a CMOS-compatible technology for planar coils with ferromagnetic cores. Limitations of sensor measurement range and linearity are analyzed by analytical and numerical calculations of stray fields and demagnetizing effects in the cores coupled with signal analysis of the calculated coil output voltage. The sensor resultion is limited by magnetic domain effects. Based on these results the sensor layout is optimized for the compass application. Electrical and magneto-optical methods for on wafer characterisation of the ferromagnetic layer, the electrical and magnetical coil parameters and the sensor itself are developed and meet production requirements.
| Identifer | oai:union.ndltd.org:DUETT/oai:DUETT:duett-05222001-120352 |
| Date | 22 May 2001 |
| Creators | Wende, Ulrich |
| Contributors | Prof.Dr.rer.nat. Günter Zimmer |
| Publisher | Gerhard-Mercator-Universitaet Duisburg |
| Source Sets | Dissertations and other Documents of the Gerhard-Mercator-University Duisburg |
| Language | German |
| Detected Language | English |
| Type | text |
| Format | text/html, application/pdf |
| Source | http://www.ub.uni-duisburg.de/ETD-db/theses/available/duett-05222001-120352/ |
| Rights | unrestricted, I hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. Hiermit erteile ich der Universitaet Duisburg das nicht-ausschliessliche Recht unter den unten angegebenen Bedingungen, meine Dissertation, Staatsexamens- oder Diplomarbeit, meinen Forschungs- oder Projektbericht zu veroeffentlichen und zu archivieren. Ich behalte das Urheberrecht[Tue May 22 12:00:52 2001] (eval 35): Bareword found where operator expected at (eval 35) line 2, near |
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