A procedure for yield prediction and reliability estimation for microlectronic circuit manufacturing was developed in this thesis. Therefore the interaction between defects distributed randomly and chip layout structures was investigated mainly. At first a new method for the optical defect measurement has been introduced considering the real defect outline which is unavoidable to extract the correct defect size distribution. The simulation tool CALYPSO was created to detect the sensitivity of the layout on defects of various types and sizes. The code benefits from a novel combination of well known simulation principles to reach a very high speed of the numerical runs. Not only yield relevant defects can be considered but latent and build-in reliability defects leading to lifetime shortening too. For this two additional special modules have been implemented. So CALYPSO can not only predict the reachable yield of any microelectronic circuit manufacturing but can also be used for IC lifetime estimation.
| Identifer | oai:union.ndltd.org:DUETT/oai:DUETT:duett-05222001-121707 |
| Date | 22 May 2001 |
| Creators | Miskowiec, Peter |
| Contributors | Prof. Dr. Holger Vogt |
| Publisher | Gerhard-Mercator-Universitaet Duisburg |
| Source Sets | Dissertations and other Documents of the Gerhard-Mercator-University Duisburg |
| Language | German |
| Detected Language | English |
| Type | text |
| Format | text/html, application/pdf |
| Source | http://www.ub.uni-duisburg.de/ETD-db/theses/available/duett-05222001-121707/ |
| Rights | unrestricted, I hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. Hiermit erteile ich der Universitaet Duisburg das nicht-ausschliessliche Recht unter den unten angegebenen Bedingungen, meine Dissertation, Staatsexamens- oder Diplomarbeit, meinen Forschungs- oder Projektbericht zu veroeffentlichen und zu archivieren. Ich behalte das Urheberrecht[Tue May 22 12:14:11 2001] (eval 35): Bareword found where operator expected at (eval 35) line 2, near |
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