Spatial light modulators (SLM) have been developed since the 1940s using different fabrication technologies. SLMs can be employed for various applications like projection displays, direct-writing systems for photolithographic processes and optical signal processing. This dissertation gives an overview of the studies on a micromechanical SLM with a deformable oil film as actuator placed on a CMOS-circuit with mirror-layer on top. The oil film deforms due to electrostatic forces at the surface where an electric field is applied. Incident light is transmitted through the deformed oil film and reflected by the mirror layer. The local oil film deformations result in a spatial phase modulation. A simple Schlieren optics can convert the phase modulation into an intensity pattern for image projection. This work presents the first SLM devices with a deformable oil film that is addressed by a CMOS active matrix. This new technology is called moving liquid mirror (MLM). Simulation, design, fabrication and measurements of first devices are described. The devices bear 256x256 pixels of 16um or 20um size. Contrast ratios of 43:1 in the 0th order of diffraction were measured. Gray scaling is possible with analogue voltage levels. Dynamic operation proved the capability of the MLM-actuators to operate at a frame rate of 200Hz. Arbitrary patterns can be loaded into the active-matrix CMOS-circuit with oil film for the projection of intensity images.
| Identifer | oai:union.ndltd.org:DUETT/oai:DUETT:duett-09102001-110607 |
| Date | 11 September 2001 |
| Creators | Wolter, Alexander |
| Contributors | Prof. Dr.-Ing. Peter Laws, Prof. Dr.-Ing. Heinz Fissan, Prof. Dr. rer. nat. Heinz Kück, Prof. Dr. rer. nat. habil. Günter Zimmer |
| Publisher | Gerhard-Mercator-Universitaet Duisburg |
| Source Sets | Dissertations and other Documents of the Gerhard-Mercator-University Duisburg |
| Language | German |
| Detected Language | English |
| Type | text |
| Format | text/html, application/pdf |
| Source | http://www.ub.uni-duisburg.de/ETD-db/theses/available/duett-09102001-110607/ |
| Rights | unrestricted, I hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. Hiermit erteile ich der Universitaet Duisburg das nicht-ausschliessliche Recht unter den unten angegebenen Bedingungen, meine Dissertation, Staatsexamens- oder Diplomarbeit, meinen Forschungs- oder Projektbericht zu veroeffentlichen und zu archivieren. Ich behalte das Urheberrecht und das Recht das Dokument zu veroeffentlichen und in anderen Arbeiten weiterzuverwenden. |
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