In this thesis a circuit technology is described, which enables an integrated controling of an active matrix of micromechanic spatial light modulators (SLM). Possible applications areas for micromechanic spatial light modulators are projection of still or moving images, maskless lithography and adaptive optics. Especially in the areas of lithography and adaptive optics typical requirements of light modulators are high optical resolutions, high accuracy of modulation and fast addressing in order to enable a fast image repetition rate. The developed circuits are optimised for use as a maskless litography system and provide a minimum pixel pitch of 16 <font face="Symbol">m</font><i>m</i>. Demonstrators with image areas of 256 x 256 pixels and a modulation resolution of 16 steps on each pixel enabled a minimum geometric lithographic resolution of less than 20 nm, using today available optics.
| Identifer | oai:union.ndltd.org:DUETT/oai:DUETT:duett-03062002-163308 |
| Date | 08 March 2002 |
| Creators | Kirstein, Kay-Uwe |
| Contributors | Prof. B. J. Hosticka, Ph.D., Prof. Dr. H.-L. Fiedler |
| Publisher | Gerhard-Mercator-Universitaet Duisburg |
| Source Sets | Dissertations and other Documents of the Gerhard-Mercator-University Duisburg |
| Language | German |
| Detected Language | English |
| Type | text |
| Format | text/html, application/octet-stream, application/pdf |
| Source | http://www.ub.uni-duisburg.de/ETD-db/theses/available/duett-03062002-163308/ |
| Rights | unrestricted, I hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. Hiermit erteile ich der Universitaet Duisburg das nicht-ausschliessliche Recht unter den unten angegebenen Bedingungen, meine Dissertation, Staatsexamens- oder Diplomarbeit, meinen Forschungs- oder Projektbericht zu veroeffentlichen und zu archivieren. Ich behalte das Urheberrecht und das Recht das Dokument zu veroeffentlichen und in anderen Arbeiten weiterzuverwenden. |
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