Novel inorganic photoresists for 3D microfabrication /

Description

Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2009. / Source: Dissertation Abstracts International, Volume: 70-06, Section: B, page: 3726. Adviser: Paul V. Braun. Includes bibliographical references (leaves 153-169) Available on microfilm from Pro Quest Information and Learning.

Links & Downloads

1. http://gateway.proquest.com/openurl?url_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:dissertation&res_dat=xri:pqdiss&rft_dat=xri:pqdiss:3362792

Tags

Engineering, Materials Science.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/501324100
Date	January 2009
Creators	George, Matthew C.,
Source Sets	OCLC
Language	English
Detected Language	English