The present work deals with electron microscopy, electron microscopy primarily environmental. The main task of the work will draft the optimal shape of the differentially pumped chamber, dividing the pressure difference between tube and chamber with sample for a new concept of an electron microscope. By ANSYS Fluent will be analyzed pumping gas. Subsequently, according to the results obtained will be a modified form of the differential Chamber and to achieve the lowest gas pressure on the track of the electron beam.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:221092 |
| Date | January 2015 |
| Creators | Polách, Ondřej |
| Contributors | Vyroubal, Petr, Maxa, Jiří |
| Publisher | Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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