Spectroscopic studies of etching gases and microwave diagnostics of plasmas related to the semiconductor industry.

Description

Thesis (Ph. D.)--Open University.

Links & Downloads

1. http://physics.open.ac.uk/~ev295/!MASTER_THESIS.pdf

Tags

Plasma etching Semiconductors

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/496984677
Date	January 2006
Creators	Vas̆eková, Eva.
Publisher	n.p.,
Source Sets	OCLC
Language	English
Detected Language	English
Source	PhD Thesis