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Estudo e caracterizacao de filmes finos de nitreto de titanio obtidos por evaporacao a arco catodico de deposicao a vacuo

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05586.pdf: 7089535 bytes, checksum: 4459c81f8f267c76f9328265ae1fc952 (MD5) / Dissertacao (Mestrado) / IPEN/D / Instituto de Pesquisas Energeticas e Nucleares - IPEN/CNEN-SP

Identiferoai:union.ndltd.org:IBICT/oai:repositorio.ipen.br:123456789/10377
Date09 October 2014
CreatorsGUERREIRO, SERGIO S.
ContributorsJose Octavio Armani Paschoal
Source SetsIBICT Brazilian ETDs
Detected LanguageUnknown
Typeinfo:eu-repo/semantics/publishedVersion, info:eu-repo/semantics/masterThesis
Format96
Sourcereponame:Repositório Institucional do IPEN, instname:Instituto de Pesquisas Energéticas e Nucleares, instacron:IPEN
CoverageN
Rightsinfo:eu-repo/semantics/openAccess

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