This thesis describes the theory, development and applications of laser beam characterisation for industrial laser materials processing systems. Descriptions are given of novel forms of beam diagnostic systems and their integration into highly automated industrial tools. Work is also presented that has contributed to the new ISO standard on beam characterisation. Particular emphasis is given to excimer laser applications and UV micromachining.
Identifer | oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:289110 |
Date | January 2003 |
Creators | Apte, Paul |
Publisher | Loughborough University |
Source Sets | Ethos UK |
Detected Language | English |
Type | Electronic Thesis or Dissertation |
Source | https://dspace.lboro.ac.uk/2134/33964 |
Page generated in 0.0121 seconds