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Laser beam characterisation for industrial applications

This thesis describes the theory, development and applications of laser beam characterisation for industrial laser materials processing systems. Descriptions are given of novel forms of beam diagnostic systems and their integration into highly automated industrial tools. Work is also presented that has contributed to the new ISO standard on beam characterisation. Particular emphasis is given to excimer laser applications and UV micromachining.

Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:289110
Date January 2003
CreatorsApte, Paul
PublisherLoughborough University
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation
Sourcehttps://dspace.lboro.ac.uk/2134/33964

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