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Application of Inter-Die Rank Statistics in Defect Detection

This thesis presents a statistical method to identify the test escapes. Test often acquires parametric measurements as a function of logical state of a chip. The usual method of classifying chips as pass or fail is to compare each state measurement to a test limit. Subtle manufacturing defects are escaping the test limits due to process variations in deep sub-micron technologies which results in mixing of healthy and faulty parametric test measurements. This thesis identifies the chips with subtle defects by using rank order of the parametric measurements. A hypothesis is developed that a defect is likely to disturb the defect-free ranking, whereas a shift caused by process variations will not affect the rank. The hypothesis does not depend on a-priori knowledge of a defect-free ranking of parametric measurements. This thesis introduces a modified Estimation Maximization (EM) algorithm to separate the healthy and faulty tau components calculated from parametric responses of die pairs on a wafer. The modified EM uses generalized beta distributions to model the two components of tau mixture distribution. The modified EM estimates the faulty probability of each die on a wafer. The sensitivity of the modified EM is evaluated using Monte Carlo simulations. The modified EM is applied on production product A. An average 30% reduction in DPPM (defective parts per million) is observed in Product A across all lots.

Identiferoai:union.ndltd.org:pdx.edu/oai:pdxscholar.library.pdx.edu:open_access_etds-1089
Date01 March 2012
CreatorsBakshi, Vivek
PublisherPDXScholar
Source SetsPortland State University
Detected LanguageEnglish
Typetext
Formatapplication/pdf
SourceDissertations and Theses

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