The purpouse of the master's thesis is study problematic of focused ion beams and their material influence. In this thesis are described interactions in the sample after impact of ion beam, use and applications of FIB systems. Second part of thesis are simulations of ion influence on different kinds of materials by the help of SRIM program.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:228536 |
| Creators | Faltýnek, Petr |
| Contributors | Čechal, Jan |
| Publisher | Vysoké učení technické v Brně. Fakulta strojního inženýrství |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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