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Integrated design for an optically driven micromachined silicon pressure transducer

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1. https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.357109

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:357109
Date	January 1993
Creators	Vincent, David Robert
Contributors	Brignell, John
Publisher	University of Southampton
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation
Source	https://eprints.soton.ac.uk/394151/