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Reliability of advanced dielectrics in gate oxide and device level packaging in MEMS

Thesis (Ph.D.)--University of Texas at Arlington, 2009.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/607916214
Date January 2009
CreatorsRahman, Mohammad Shahriar.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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