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Kinetic study of Si(NH) synthesis via low temperature vapor phase reaction of SiCl and NH in a fluidized bed reactor

Graduation date: 1994

Identiferoai:union.ndltd.org:ORGSU/oai:ir.library.oregonstate.edu:1957/36293
Date01 December 1993
CreatorsHsu, Chia-Chang, 1967-
ContributorsKimura, Shoichi
Source SetsOregon State University
Languageen_US
Detected LanguageEnglish
TypeThesis/Dissertation

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