Kinetic study of Si(NH) synthesis via low temperature vapor phase reaction of SiCl and NH in a fluidized bed reactor

Description

Graduation date: 1994

Links & Downloads

1. http://hdl.handle.net/1957/36293

Tags

Silicon compounds -- Reactivity

Fluidized reactors

Additional Fields

Identifer	oai:union.ndltd.org:ORGSU/oai:ir.library.oregonstate.edu:1957/36293
Date	01 December 1993
Creators	Hsu, Chia-Chang, 1967-
Contributors	Kimura, Shoichi
Source Sets	Oregon State University
Language	en_US
Detected Language	English
Type	Thesis/Dissertation