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Process and analysis of nano wire in InGaAs/AlInAs by focused ion beam

On InGaAs/AlInAs heterostructures we made nanowires which were made by focus ion beam (FIB) and the width of nanowires making by FIB were 40nm¡B70nm¡B100nm and 200nm respectively. we studied electronic characterization of nanowires using Shubnikov-de Haas(SdH).In our research,by using SdH method there are no signal in our sample which processed by FIB,then we changed to process technology in our sample.For example: Increase thickness of the protection layer,size of change channel,etc.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0719106-215754
Date19 July 2006
CreatorsYu, Chien-Pang
ContributorsMing-Kwei Lee, Jih-Chen Chiang, Ikai Lo
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageCholon
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0719106-215754
Rightsunrestricted, Copyright information available at source archive

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