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X-Ray Study of Mechanical Properties of TiN Thin Films Coated on Steel by Ion Beam Mixing Method

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1. http://hdl.handle.net/2237/9182
2. 1344-7912
3. JSME International Journal. Series A, v.46, n.1, 2003, p.86-92

Identifer	oai:union.ndltd.org:NAGOYA/oai:ir.nul.nagoya-u.ac.jp:2237/9182
Date	01 1900
Creators	ITO, Toshimasa, TANAKA, Keisuke, AKINIWA, Yoshiaki, ISHII, Takahiro, MIKI, Yasuhiro
Publisher	The Japan Society of Mechanical Engineers
Source Sets	Nagoya University
Language	English
Detected Language	English
Type	Article(publisher)
Rights	日本機械学会, 本文データは学協会の許諾に基づきCiNiiから複製したものである。