Measurement and modeling of fluid pressures in chemical mechanical polishing

Description

Thesis (Ph. D.)--Mechanical Engineering, Georgia Institute of Technology, 2005. / Steven Danyluk, Committee Chair ; Richard Salant, Committee Member ; Jeffrey Streator, Committee Member ; Michael Sacks, Committee Member ; Dennis Hess, Committee Member ; Leonard Borucki, Committee Member. Includes bibliographical references.

Links & Downloads

1. http://etd.gatech.edu/theses/available/etd-03022005-142857/unrestricted/ng%5Fsumhuan%5F200505%5Fphd.pdf

Tags

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/60766665
Date	January 2005
Creators	Ng, Sum Huan.
Source Sets	OCLC
Language	English
Detected Language	English
Source	Available online, Georgia Institute of Technology, 2005.