Layer transfer of semiconductors and complex oxides by helium and, or hydrogen implantation and wafer bonding

Description

Halle, Wittenberg, University, Diss., 2003.

Links & Downloads

1. http://deposit.ddb.de/cgi-bin/dokserv?idn=969938284
2. http://sundoc.bibliothek.uni-halle.de/diss-online/03/03H198/prom.pdf

Tags

Galliumarsenid Halbleitersubstrat

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/76677138
Date	January 2003
Creators	Radu, Ionut.
Publisher	[S.l. : s.n.],
Source Sets	OCLC
Language	English
Detected Language	English
Source	LF