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An automated micro-grinding system for the fabrication of precision micro-scale profiles

Production of micro-scale components is an important emergent field. One underdeveloped area is the production of micro-scale 3D surfaces, which has important applications in micro-optics and fibre optic sensors. One particular application is the production of micro-lenses. With scales of less than 200 ??m these lenses can improve light coupling efficiencies in micro-optic systems. However, current lens production techniques have limitations in accuracy and versatility. Creating these surfaces through mechanical micro-grinding has the potential to improve the precision and variety of profiles that can be produced, thus improving transmission efficiencies and leading to new applications. This work presents a novel micro-grinding method for the production of microscale asymmetric, symmetric and axisymmetric curved components from brittle materials such as glasses. A specialised micro-grinding machine and machining system has been designed, constructed and successfully tested and is presented here. This system is capable of producing complex profiles directly on the tips of optical fibre workpieces. A five degree of freedom centring system is presented that can align and rotate these workpieces about a precision axis, enabling axisymmetric grinding. A machine vision system, utilising a microscope lens system and sub-pixel localisation techniques, is used to provide feedback for the process, image processing techniques are presented which are shown to have a sensing resolution of 300 nm. Using these systems, workpieces are centred to within 500 nm. Tools are mounted on nanometre precise motion stages and motion and infeed are controlled. Tooling configurations with flat and tangential grinding surfaces are presented along with control and path generation algorithms. The capabilities and shortcomings of each are presented along with methods to predict appropriate feed rates based on experimental data. Both asymmetric and axisymmetric flat and curved micro-profiles have been produced on the tips of optical fibres using this system. These are presented and analysed and show that the system, as described, is capable of producing high quality micro-scale components with submicron dimensional accuracy and nanometric surface quality. The advantages of this technique are compared with other processes and discussed. Further development of the system and technique are also considered.

Identiferoai:union.ndltd.org:ADTP/215650
Date January 2006
CreatorsMilton, Gareth Edward, Mechanical & Manufacturing Engineering, Faculty of Engineering, UNSW
PublisherAwarded by:University of New South Wales. School of Mechanical and Manufacturing Engineering
Source SetsAustraliasian Digital Theses Program
LanguageEnglish
Detected LanguageEnglish
RightsCopyright Gareth Edward Milton, http://unsworks.unsw.edu.au/copyright

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