PART PER BILLION LEVEL DETECTION OF SEMICONDUCTOR PROCESSING GAS AND VAPOR EMISSIONS BY FOURIER TRANSFORM INFRARED SPECTROSCOPY

Description

Thesis (Ph. D.)--University OF MICHIGAN. / CHAIRMAN: STEVEN P. LEVINE.

Links & Downloads

1. http://catalog.hathitrust.org/api/volumes/oclc/68299460.html

Tags

HEALTH SCIENCES, PUBLIC HEALTH.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/556191533
Date	January 1900
Creators	STRANG, CHRISTOPHER ROBERT.
Source Sets	OCLC
Language	English
Detected Language	English